Semiconductor Sealing Solutions – Engineered Around Your Process
High-Purity FFKM Sealing Solutions for Semiconductor Manufacturing
Semiconductor processes place exceptional demands on sealing materials. Reactive plasmas, aggressive chemicals, elevated temperatures and high-vacuum conditions can cause seal degradation, particle generation and unplanned equipment downtime.
Rubberatkins combines semiconductor-focused material technology, precision component manufacturing and application engineering to develop sealing solutions around the requirements of each process.
From material selection and component design through clean manufacturing and production support, we help equipment manufacturers and semiconductor supply-chain partners address critical sealing challenges.
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The Rubberatkins PURE® Range
Materials Developed for Semiconductor Process Environments
No single sealing material is ideal for every semiconductor application. The Rubberatkins PURE range provides distinct FFKM material technologies for chemical, thermal, vacuum and plasma-exposed environments.
The Rubberatkins PURE® Range
Plasma • Purity • Process Reliability
PLASMANITE PURE® is a family of plasma-optimised FFKM materials developed for seals exposed to reactive semiconductor process environments.
These materials are designed to resist plasma-induced degradation and help minimise seal erosion, particle generation and contamination risk.
Typical applications include:
- Conductor and dielectric plasma etch
- Ashing and photoresist stripping
- PECVD and plasma-enhanced ALD
- Oxygen plasma processes
- Fluorine-based chamber cleaning
- Chamber lids and gas inlet seals
- Slit, gate, isolation and pendulum valves
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Thermal • Wet • Chemical
VERMANITE PURE® is a family of high-purity FFKM materials developed for aggressive chemical, elevated-temperature and vacuum applications.
VERMANITE PURE® materials demonstrate exceptionally low levels of ionic, metallic and organic extractables, making them suitable for demanding wet-processing and UPW applications.
The range is designed to provide reliable sealing performance where chemical compatibility, compression-set resistance and contamination control are critical.
Typical applications include:
- Wet-process equipment
- Chemical delivery systems
- Pumps and valves
- Gas-handling systems
- High-temperature vacuum equipment
- Thermal CVD and ALD
- Chamber and foreline seals outside direct plasma exposure
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Sealing Solutions Across Wafer Fabrication
Rubberatkins develops sealing solutions for critical applications throughout semiconductor manufacturing and its supporting equipment infrastructure.
Etch and Plasma Processing
FFKM materials developed for exposure to reactive plasma chemistries and demanding thermal and vacuum conditions.
Applications include conductor etch, dielectric etch, ashing, stripping and chamber-cleaning processes.
Deposition
Sealing solutions for thermal and plasma-enhanced deposition equipment, including:
- CVD and PECVD
- ALD and PEALD
- PVD and sputtering
- Gas delivery and chamber isolation
Wet Processing and Chemical Delivery
Chemically resistant seals for aggressive acids, bases, solvents and process chemicals used in:
- Wet cleaning
- Chemical distribution
- Chemical filtration
- Pumps and valves
- CMP chemical and slurry handling
Material selection is based on the specific chemistry, concentration, temperature and mechanical conditions of the application.
Vacuum and Sub-Fab Equipment
Sealing solutions for vacuum pumps, forelines, exhaust-management equipment, isolation valves and other supporting systems operating under chemically aggressive process conditions.
Find the Right Material for Your Process
Precision Components for Critical Equipment
Rubberatkins manufactures standard and application-specific sealing components for semiconductor processing equipment.
Our component capabilities include:
- Standard, metric and application-specific O-rings
- Large-diameter chamber seals
- Lid and isolation-valve seals
- Slit-valve and gate-valve seals
- Gas inlet and outlet seals
- Gaskets and profiled seals
- Custom-moulded elastomer components
- Complex and application-specific geometries
Every component can be developed around the process environment, hardware design, dimensional requirements and required cleanliness level.
Where a standard O-ring is not the optimum solution, our engineers can support the development of a customised seal geometry or material specification.
Clean Manufacturing and Controlled Supply – Cleanliness Built into the Manufacturing Process
Contamination control extends beyond the compound itself. Material handling, moulding, finishing, inspection, cleaning and packaging can all affect the suitability of a seal for semiconductor use.
Rubberatkins applies controlled manufacturing and handling procedures to help minimise contamination throughout production.
Our semiconductor manufacturing capabilities include:
- ISO Class 5 cleanroom operations
- Controlled material handling
- Precision moulding and finishing
- Defined cleaning processes
- Visual and dimensional inspection
- Controlled packaging
- Batch identification and traceability
- Certificate of Conformance documentation
- Application-specific quality requirements
Cleanroom processing and packaging requirements can be tailored according to the component, process environment and customer specification.
Rubberatkins Is More Than a Material Supplier
A Technical Partner for Semiconductor Sealing
Every semiconductor process presents a different combination of chemistry, plasma exposure, temperature, vacuum and mechanical requirements. Rubberatkins works with customers to understand these conditions before recommending a material or component.
Our technical support includes:
- Application and operating-condition analysis
- Material selection
- Seal and component design
- Existing seal and failure-mode assessment
- Chemical compatibility evaluation
- Plasma, thermal and mechanical testing
- Prototype and sample development
- Replacement-material development
- Production qualification support
- Ongoing technical assistance
By considering the complete application, not simply the O-ring size we help customers identify the most appropriate combination of material, component design and manufacturing control.
Let’s Solve Your Sealing Challenge
Whether you are developing new semiconductor equipment, qualifying an alternative material or investigating a recurring seal failure, our technical team can help.
Tell us about your process conditions, existing material and performance requirements, and we will work with you to identify the appropriate sealing solution.
Request an Application Review – Contact Our Semiconductor Team